This motorized Z-axis
positioning is made of aluminum
The stage size is 100 x 100 mm.
The Range of Travel is 40 mm.
The Load Capacity is 12 kg.
is 0.2 µm / 0.1 µm with 10 / 20 micro-steps per step
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 5 µm.
The maximum speed is 10 mm / sec.